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Reliability of Mems: Testing of Materials and Devices

Reliability of Mems: Testing of Materials and Devices

Jan G. Korvink
0/5 ( ratings)
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This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
Pages
324
Format
ebook
Publisher
Wiley-Vch
Release
March 26, 2013
ISBN
3527675035
ISBN 13
9783527675036

Reliability of Mems: Testing of Materials and Devices

Jan G. Korvink
0/5 ( ratings)
Read Download
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
Pages
324
Format
ebook
Publisher
Wiley-Vch
Release
March 26, 2013
ISBN
3527675035
ISBN 13
9783527675036

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