Read Anywhere and on Any Device!

Subscribe to Read | $0.00

Join today and start reading your favorite books for Free!

Create Free Account

Nanopositioning Technologies: Fundamentals and Applications

0/5 ( ratings)

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Pages: 409

Format: Hardcover

Publisher: Springer

Release: January 07, 2016

ISBN: 3319238523

ISBN 13: 9783319238524

Nanopositioning Technologies: Fundamentals and Applications

0/5 ( ratings)

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Pages: 409

Format: Hardcover

Publisher: Springer

Release: January 07, 2016

ISBN: 3319238523

ISBN 13: 9783319238524

More books from Xinyu Liu

Chalcogenide: From 3D to 2D and Beyond

Micro and Nano Systems for Biophysical Studies of Cells and Small Organisms

Micro- And Nanomanipulation Tools

Rate this book!

Write a review?